## Abstract

A cross section set for CF3 + ions in CF4 gas has been assembled from the available experimental and theoretical data using a swarm method. Elastic cross section consistent with the available experimental mobility data has been derived and the set also includes the reactive cross sections. Reactive rates are deduced for collision energies of up to 500 eV. The transport properties of

CF3 + ions in CF4 gas in DC (direct current) electric field fields at a gas temperature of T=300 K were calculated as a function of the reduced electric field E/N (E is electric field and N is gasnumber density) by using a Monte Carlo simulation. The non-conservative collisions are alsotaken into account in the definition of transport coefficients.

CF3 + ions in CF4 gas in DC (direct current) electric field fields at a gas temperature of T=300 K were calculated as a function of the reduced electric field E/N (E is electric field and N is gasnumber density) by using a Monte Carlo simulation. The non-conservative collisions are alsotaken into account in the definition of transport coefficients.

Original language | English |
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Article number | 045006 |

Number of pages | 6 |

Journal | Plasma Sources Science and Technology |

Volume | 28 |

DOIs | |

Publication status | Published - 9 Apr 2019 |

## Keywords

- Monte Carlo methods
- atomic, molecular, ion and heavy-particle collisions
- kinetic and transport theory of gases